Chat with us, powered by LiveChat XYZP 수직 Ceramic Air Bearing Stage | Justek - Komachine
Product Name XYZP 수직 Ceramic Air Bearing Stage
Model
Series Motion Stages
Catalog
Product Description

Specification

Axis

X(Scan)

Y(Step)

Work area

700mm

800mm

Guide

Ceramic air bearing

Air bearing

load mass

100kg

-

Acceleration

2m/sec²

Position accuracy(보정후)

±0.3㎛

±1.1㎛

Repeatability

±0.2㎛

±0.2㎛

Straightness

1.8㎛

2.4㎛

Applications

Photo mask inspection equipment

Products of Justek