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Product Name Heat-Wet
Model PCS-HW400S
Series Scrubber
Catalog
Product Description

System that uses electrical heater to heat waste gas generated from semiconductor manufacturing process above the natural ignition point to treat toxic gas.

Combustible and water soluble gas treatment using high temperature heater

Lower operating cost compared to the burn & plasma type

ITEM

SPECIFICATION

Dimension(W x D x H)

750mm x 700mm x 1600mm

Power

208 VAC, 3 Phase, 8kW

Capacity

300 SLM

Utilities

N2, CDA, CW

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