|Product Name||XY Co-planar Air Bearing Stage|
Since the load is supported by the XY plane, XY Co-Planar stage is free from the deformation caused by the movement of the load, common in the structure where Y axis is loaded on the X axis. This gives the advantages of high structural stability and low height. It can also generate various motions by use of the additional Z and T axis.
520mm X 520mm X 6mm(Z) X 360deg(T)
0.1%, at 100mm/sec
|T axis, Z axis||
DD Motor, wedge type
Solar cell, Wafer Equipment, etc.