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Product Name XY Co-planar Air Bearing Stage
Model
Series Motion Stages
Catalog
Product Description

Description

Since the load is supported by the XY plane, XY Co-Planar stage is free from the deformation caused by the movement of the load, common in the structure where Y axis is loaded on the X axis. This gives the advantages of high structural stability and low height. It can also generate various motions by use of the additional Z and T axis.

 

Specification

Axis

   
Work area

520mm X 520mm X 6mm(Z) X 360deg(T)

Guide

Air bearing

Load mass

20kg

Acceleration

2m/sec²

Position accuracy(보정후)

1㎛

Repeatability

±0.5㎛

Speed ​​ripple

0.1%, at 100mm/sec

T axis, Z axis

DD Motor, wedge type

Applications

Solar cell, Wafer Equipment, etc.

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