

반도체장비 및 진공장비 전문업체, VACUUM 시스템, 태양전지
SPECIFICATIONS
| Model No. | MLS-V1 |
| Table size (mm) | 320*200 (mm) |
| Motion range (mm) | 1200 (mm) |
| Resolution (µm) | 1 (Half Step) |
| Accuracy (µm) | 5 |
| Repeatability (µm) | 10 |
| Load capacity | 20kgf |
| Guide mechanism | LM Guide |
| Lead mechanism | Ball Screw,Lead 10mm |
| Material | Granite Palte |















