설명

The easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs. FIBs, and other vacuum chambers. The Evactron® 257 Zephyr uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination. The Evactron® 252 Zephyr is created for chambers that use turbo molecular pumps (TMPs). The 25Z is designed to clean/decontaminate in the turbo pressure regime at 1-50 m Torr and has no adverse effects on the TMP temperatures.

 

특징

1) Clean chambers at turbo pump pressures
2) 5-20 Watts RF power
3) ≥10x Improved cleaning rate
4) One button operation
5) 1-50 m Torr operating pressure

 

Benefits

1) No stress to the turbo molecular pump
2) Safely de-contaminates the chamber without damage to sensitive components
3) Shorter cleaning time, giving increased production with less system down time
4) Cleans chamber while in “pump down”
5) Increased mean free path- yet ion damage free