The Ultrasonic Point Level System 9600 Series is designed to detect the level of Ultrs-Pure Liquid Chemical in Bubblers and Ampoules in the Semiconductor industry in PVD, CVD and ALD processes. The probe fits in the ½" or ¾" VCR fill port of the ampoules. There are no moving parts to the probe that may introduce impurities. It is not dependent on the color, dielectric, density and viscosity of the chemical. The design allows for multiple sensing points. All wetted parts of the probe is 316SS, electropolish finish and leak tested. Each probe is custom made to user's specifications and requirements.

The electronics are remotely mounted from the probes to allow for higher temperature applications. There is no calibration or adjustments between sensors.

 

 

Probe Design Features

• Material : Tube or Fork 316LSS
• W-Probe 4 or 8 points on 0.375" OD tube with 0.21" ID-½"VCR
• W-Probe 4 or 8 points on 0.562" OD tube with 0.31" ID-¾"VCR
• M-Probe 4 point on 0.562" OD tube for low level - ¾"VCR
• Temperature : -20 to 120 ℃
• Pressure : 250 PSIG
• Repeatability : Typical ±0.05"
• Lowest Sensing Point on probe : 0.20"
• Minimum distance between point : 0.20"
• Finish : Elector-polished / 10u Ra Surface
• Cable : 2' long integral or remote
• Optional : K-type Thermocouple

 

 

Electronic Module Design Features

• Input : 24VDC
• Output : 1A SPDT with LED Display
• Additional Fault relay output / sensor disconnect
• Additional Auto fill / empty output
• Sensor disconnect
• Optional : 90 to 240VDC power supply
• Optional : K-Type Thermocouple display
• Remot / Integral / Custom Electronics
• Molded Cable Extension