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케이브이씨

케이브이씨

케이브이씨

케이브이씨

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케이브이씨

케이브이씨

초고진고용 펌프

모델명

시리즈

진공계측기

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구조 및 원리

케이브이씨 초고진고용 펌프 2

- 오일증기가 아래쪽을 향하여 분사되어 배기되는 가스 분자가 분사류속으로 확산하여 분사류 방향으로 압축되어 배기된다. 

- 펌프용기, 확산펌프오일, 오일을 가열 증발시키는 보일러 열원인 히터, 증발된 오일을 분사시미는 젯트로 구성, 펌프용기에 오일증기를 응축시켜 액체로 되돌리기 위한 수냉관이 감겨져 있다.

- 펌프용기 아래쪽벽에 압축된 가스분자를 후단의 오일 회전 펌프로 보내기 위해 배기구를 설치한다. 

- 펌프용기는 항아리 타입과 원통형으로 제작되는 것이 보통이며 재질은 스텐레스를 주로 사용하며 COLD TRAP을 흡입구측에 설치하면 더 높은 진공도를 얻을 수 있다. 
 

케이브이씨 초고진고용 펌프 3

모 델

WSDP-4

WSDP-8

WSDP-10

WSDP-15

WSDP-18

WSDP-22

WSDP-28

특 징

배기속도[l/sec]

600

2000

3000

5000

9000

12000

25000

-보수점검 용이

-빠른 배기속도

-Body:SUS304

도달압력[Torr]

10-7

10-7

10-7

10-7

10-7

10-7

10-7

임계배압[Toor]

0.2

0.2

0.2

0.25

0.25

0.3

0.3

흡 입 구[inch]

4

8

10

15

18

22

28

배 기 구[inch]

1

1 1/2

2

2 1/2

4

6

6

소요전력[kW]

0.7

2

3

6

5.4(6.5)

6(8)

9(13)

펌프오일[l]

0.2

0.5

0.9

1.5

3

5

8

냉각수량[l/min]

1.5

2.5

5

8

10

12

15

예열시간[min]

15

20

22

25

30

35

40

▶ F100/110, F100/110T, F100/110N Turbomolecular Pumps

TypeF100/110F100/110TFX100/110D
UHV FlangeDN100LFDN100CFDN100LFDN100CFDN100LFDN100CF
Order No.      
Pumping Speed (L/s)110110110
Compression RatioN2:>108>108>108
 H2:5x1025x1025x102
Ultimate Vacuum(Pa) 6x10-8* 6x10-8* 6x10-8*
6x10-6 6x10-6 6x10-6 
 6x10-7 6x10-7 6x10-7
Output FlangeKF25KF25KF25
BearingMetal Ball BearingsCeramic Ball Bearing 
Start-up Time(min)<2<2<2
Rotational Speed(rpm)423004230042300
Cooling RquirementsWater&AirWater&AirWater&Air
Operating PositionVertical Or HorizonalVertical Or HorizonalVertical Or Horizonal
Weight(Kg)888
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.

▶ F100/110, F100/110T, F100/110N Turbomolecular Pumps

TypeF160/450F160/450TF160/450N
UHV FlangeDN160LFDN150CFDN160LFDN150CFDN160LFDN150CF
Order No.      
Pumping Speed (L/s)450450450
Compression RatioN2:>108>108>108
 H2:103103103
Ultimate Vacuum(Pa) 6x10-8* 6x10-8* 6x10-8*
6x10-6 6x10-6 6x10-6 
 6x10-7 6x10-7 6x10-7
Output FlangeKF40KF40KF40
BearingMetal Ball BearingsCeramic Ball BearingCeramic Ball Bearing
Start-up Time(min)<5<5<5
Rotational Speed(rpm)240002400024000
Cooling RquirementsWaterWaterWater
Operating PositionVertical ±5°Vertical ±5°Vertical ±5°
Weight(Kg)303030
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.

▶ F160/450, F160/450T, F160/450N Turbomolecular Pumps

TypeF160/620F160/620ZF160/620N
UHV FlangeDN160LFDN150CFDN160LFDN150CFDN160LFDN150CF
Order No.      
Pumping Speed (L/s)600600600
Compression RatioN2:>109>109>109
 H2:6x1036x1036x103
>Ultimate Vacuum(Pa) 6x10-8* 6x10-8* 6x10-8*
6x10-6 6x10-6 6x10-6 
 6x10-7 6x10-7 6x10-7
Output FlangeKF40KF40KF40
BearingMetal Ball BearingsGrease Lubricate Ceramic Ball BearingCeramic Ball Bearing
Start-up Time(min)<5<5<5
Rotational Speed(rpm)240002400024000
Cooling RquirementsWaterWaterWater
Operating PositionVertical ±5°Any DirectionVertical ±5°
Weight(Kg)323232
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.

▶ F160/620, FF160/620Z, FF160/620N Compound Molecular Pumps

TypeFF160/800FF160/800ZFF160/800N
UHV FlangeDN160LFDN150CFDN160LFDN150CFDN160LFDN150CF
Order No.      
Pumping Speed (L/s)800800800
Compression RatioN2:>109>109>109
 H2:6x1036x1036x103
Ultimate Vacuum(Pa)> 6x10-8* 6x10-8* 6x10-8*
6x10-6 6x10-6 6x10-6 
 6x10-7 6x10-7 6x10-7
Output FlangeKF40KF40KF40
BearingMetal Ball BearingsGrease Lubricate Ceramic Ball BearingCeramic Ball Bearing
Start-up Time(min)<5<5<5
Rotational Speed(rpm)270002700027000
Cooling RquirementsWaterWaterWater
Operating PositionVertical ±5°Any DirectionVertical ±5°
Weight(Kg)353535
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.

▶ FF160/800, FF160/800T, FF160/800N Compound Molecular Pumps

TypeFF200/1200FF200/1200ZFF200/1200N
UHV FlangeDN200LFDN200CFDN200LFDN200CFDN200LFDN200CF
Order No.      
Pumping Speed (L/s)120012001200
Compression RatioN2:>109>109>109
 H2:6x1036x1036x103
Ultimate Vacuum(Pa) 6x10-8* 6x10-8* 6x10-8*
6x10-6 6x10-6 6x10-6 
 6x10-7 6x10-7 6x10-7
Output FlangeKF40KF40KF40
BearingMetal Ball BearingsGrease Lubricate Ceramic Ball BearingCeramic Ball Bearing
Start-up Time(min)<5<5<5
Rotational Speed(rpm)240002400024000
Cooling RquirementsWaterWaterWater
Operating PositionVertical ±5°Any DirectionVertical ±5°
Weight(Kg)454545
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.

▶ FF200/1200, FF200/1200T, FF200/1200N Compound Molecular Pumps

TypeF250/1500F250/1500TF250/1500N
UHV FlangeDN250LFDN250CFDN250LFDN250CFDN250LFDN250CF
Order No.      
Pumping Speed (L/s)150015001500
Compression RatioN2:>108>108>108
 H2:5x1025x1025x102
Ultimate Vacuum(Pa) 6x10-8* 6x10-8* 6x10-8*
6x10-6 6x10-6 6x10-6 
 6x10-7 6x10-7 6x10-7
Output FlangeKF50KF50KF50
BearingMetal Ball BearingsCeramic Ball BearingCeramic Ball Bearing
Start-up Time(min)<8<8<8
Rotational Speed(rpm)210002100021000
Cooling RquirementsWaterWaterWater
Operating PositionVertical ±5°Vertical ±5°Vertical ±5°
Weight(Kg)606060
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.

▶ F250/1500, F250/1500T, F250/1500N Turbomolecular Pumps

TypeF400/3500F400/3500T
UHV FlangeDN400LFDN400LF
Order No.  
Pumping Speed (L/s)35003500
Compression RatioN2:>108>108
 H2:5x1025x102
Ultimate Vacuum(Pa)6x10-66x10-7*6x10-66x10-7*
Output FlangeLF100LF100
BearingCeramic Ball BearingCeramic Ball Bearing
Start-up Time(min)<35<35
Rotational Speed(rpm)1350013500
Cooling RquirementsWaterWater
Operating PositionVertical ±5°Vertical ±5°
Weight(Kg)9090
* to acquired the parameter, its backing pump are vane pump + oil diffusion pump.

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