Search

코리아바큠테크

031-987-6320
기업찾기코리아바큠테크
1/1
코리아바큠테크

코리아바큠테크

-

모델명

시리즈

Etcher


구매 안내

아래는 참고용 정보이므로 세부 조건은 반드시 제조사/판매자에게 문의 바랍니다.

결제 방법

제조사/판매자에게 문의 바랍니다.

납기 정보

제조사/판매자에게 문의 바랍니다.

배송 정보

제조사/판매자에게 문의 바랍니다.

원산지

대한민국


031-987-6320

제품 상세 설명

Korea Vacuum Tech  RIE Series

Overview

Reactive ion Etching (RIE) is an etching technology that utilizes chemically reactive

plasma to remove masked materials deposited on wafers during microfabrication. The

combination of an electromagnetic field in a low pressure (vacuum) environment is

used to create a plasma source from which high energy ions attack a wafer surface and react.

Features

≻ High selectivity, uniform plasma etching

≻ Simple configuration makes maintenance easy

≻ Negative self-bias forms on lower electrode

≻ Low damage & contamination


System configuration

Substrate size

2” - 6” (50.8mm - 150mm)

Operating pressure (Torr)

< 30mTorr

Uniformity within substrate /

substrate to substrate surfaces

± 5% max.

Process Chamber

Al anodized Chamber

Heating or cooling / Bias

Ultimate Pressure

Gas Nozzle

6” - 8” shower head type


Korea Vacuum Tech  RIE Series 1

Korea Vacuum Tech  RIE Series 2

Overview

Reactive ion Etching (RIE) is an etching technology that utilizes chemically reactive

plasma to remove masked materials deposited on wafers during microfabrication. The

combination of an electromagnetic field in a low pressure (vacuum) environment is

used to create a plasma source from which high energy ions attack a wafer surface and react.

Features

≻ High selectivity, uniform plasma etching

≻ Simple configuration makes maintenance easy

≻ Negative self-bias forms on lower electrode

≻ Low damage & contamination


System configuration

Substrate size

2” - 6” (50.8mm - 150mm)

Operating pressure (Torr)

< 30mTorr

Uniformity within substrate /

substrate to substrate surfaces

± 5% max.

Process Chamber

Al anodized Chamber

Heating or cooling / Bias

Ultimate Pressure

Gas Nozzle

6” - 8” shower head type


Korea Vacuum Tech  RIE Series 3

문의하기