Overview

An evaporator uses an electric resistance heater or high-energy beam to melt material

and to raise its vapor pressure to a useful range. This process takes place in a high

vacuum state to allow the vapor to reach the substrate without reacting with or

scattering against other gas-phase atoms in the chamber while reducing the

incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series

evaporation systems are capable of fabricating multi-layer thin films by applying this

co-deposition process.

 ≻ Excellent Thickness Uniformity

        The KVE Series E-Beam&Sputter Evaporator System provide excellent thickness uniformity of

        resultant films. And if you deposit the thin films to same condition, you will get the thin

        films of same feature.

≻ Combination system

        This system has E-beam source and sputtering source. Therefore, you can deposit

        thin films of various properties.