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코리아바큠테크

031-987-6320
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코리아바큠테크

코리아바큠테크

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모델명

시리즈

Evaporator


구매 안내

아래는 참고용 정보이므로 세부 조건은 반드시 제조사/판매자에게 문의 바랍니다.

결제 방법

제조사/판매자에게 문의 바랍니다.

납기 정보

제조사/판매자에게 문의 바랍니다.

배송 정보

제조사/판매자에게 문의 바랍니다.

원산지

대한민국


031-987-6320

제품 상세 설명

Korea Vacuum Tech  Thermal Series

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. 

 

FEATURES

≻ Excellent thin film uniformity

≻ Vacuum compatible to 5.0E-7Torr

≻ Rotate the substrate.

≻ Stability rate

≻ Multi-layer processing

≻ Easy Manipulation


Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Substrate Unit

Rotation / Heating / Cooling

Sample Size

4” ~ 12”

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / up to 8

Process Control Type

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr


Korea Vacuum Tech  Thermal Series 1

Korea Vacuum Tech  Thermal Series 2

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. 

 

FEATURES

≻ Excellent thin film uniformity

≻ Vacuum compatible to 5.0E-7Torr

≻ Rotate the substrate.

≻ Stability rate

≻ Multi-layer processing

≻ Easy Manipulation


Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Substrate Unit

Rotation / Heating / Cooling

Sample Size

4” or more

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / Two or more

Process Control Type

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr


Korea Vacuum Tech  Thermal Series 3

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