코리아바큠테크
Evaporator
모델명
시리즈
Evaporator
구매 안내
아래는 참고용 정보이므로 세부 조건은 반드시 제조사/판매자에게 문의 바랍니다.
결제 방법
제조사/판매자에게 문의 바랍니다.
납기 정보
제조사/판매자에게 문의 바랍니다.
배송 정보
제조사/판매자에게 문의 바랍니다.
원산지
제조사/판매자에게 문의 바랍니다.
제품 상세 설명
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item.
FEATURES
≻ Excellent thin film uniformity
≻ Vacuum compatible to 5.0E-7Torr
≻ Rotate the substrate.
≻ Stability rate
≻ Multi-layer processing
≻ Easy Manipulation
Specifications
Process Chamber | Stainless steel |
Vacuum Pumping Station | TMP / Cryo pump |
Substrate Unit | Rotation / Heating / Cooling |
Sample Size | 4” ~ 12” |
Power Supply Unit | 10V,300A / 10V,100A |
Source Type & Number | Boat, Crucible / up to 8 |
Process Control Type | |
Film Thickness Uniformity | < ±5% |
Ultimate Pressure | < 5.0E-7Torr |
Overview
KVT has developed the evaporator system with high precision deposition rate control
and unique design & technology. KVE series is designed and manufactured to
deposition equipment with variable item.
FEATURES
≻ Excellent thin film uniformity
≻ Vacuum compatible to 5.0E-7Torr
≻ Rotate the substrate.
≻ Stability rate
≻ Multi-layer processing
≻ Easy Manipulation
Specifications
Process Chamber | Stainless steel |
Vacuum Pumping Station | TMP / Cryo pump |
Substrate Unit | Rotation / Heating / Cooling |
Sample Size | 4” or more |
Power Supply Unit | 10V,300A / 10V,100A |
Source Type & Number | Boat, Crucible / Two or more |
Process Control Type | |
Film Thickness Uniformity | < ±5% |
Ultimate Pressure | < 5.0E-7Torr |
