Search

기업찾기(주)진우엔지니어링
1/1
(주)진우엔지니어링

(주)진우엔지니어링

ARAF Coater

모델명

시리즈

Plasma Application


구매 안내

아래는 참고용 정보이므로 세부 조건은 반드시 제조사/판매자에게 문의 바랍니다.

결제 방법

제조사/판매자에게 문의 바랍니다.

납기 정보

제조사/판매자에게 문의 바랍니다.

배송 정보

제조사/판매자에게 문의 바랍니다.

원산지

대한민국


031-353-8350

제품 상세 설명

ARAF Coater

Sputter is used for multi-layer Array Plating of Si to add the Anti Reflect function. It is intended for Thin Plating of the Anti Finger liquid chemical on Glass surface of the Rabital Target.
The equipment is used to reduce Glass upper surface and reflection, improve Transmissivity, and prevent scratches caused by finger prints.
It is also used to form AR & AF Plating on tempered glasses such as for Smart Phones & Tablet PC. 

JINWOO ENGINEERING ARAF Coater

Features

Size

High4,500 x 3,800 x 2369mm
(6,000 x 6,500 x 2,500mm : Include Loading Zone)

Gross Weight

4,500kg

Equipment Specification

Compressed Air

Pressure

 Min/Max, 6/8Kgf/㎠

Usage

20ℓ/min

Cooling Water

Air cooling type detachable

 25 RT, 2kgf/㎠, 5-25℃

Tank capacity

350ℓ

Utility

Electric Power

380V 3P 4W, 115kW

Main distributing board : 175A_3 phase

Power cable : 60SQ 3phase+Ground 16SQ _Single phase

150

 

Specification

Substrate & Carrier

Substrate material

Tempered Glass

Substrate size

[10.1" std.] 192ea / 1time process

Tact Time

Less than 80 Min/ 1 time process

Vacuum

Ultimate pressure

5.0 x 10-5 torr↓

No Load (No specimen)

Vacuum exhaust speed

6min ↓ (ATM→ 5x10-2 torr)

Status

20min ↓ (ATM→ 5.0x10-5 torr)

Main

Chamber

Φ1,600*H1600

Chamber

Φ1,600*H1600

Source

Sputter+ Evaporation

Work Jig

Φ300 * 12 Axis

 

Pump

Diffusion Pump

20” 1 Set

Rotary & Booster Pump

E2M275 & EH2600

Vacuum Level

5*10-5torr

Option

Chiller

25RT

Poly Cold

200,000L/Sec

 

Layout

JINWOO ENGINEERING ARAF Coater  1

 

Comparison

Description

AR AF-1600 Sputter ( Φ1,600 )

E-Beam AF ( Φ2,050 )

Capa

Batch Time

80min

45min

Glass Size

4”

7”

10.1”

4”

7”

10.1”

1 Batch

1,080

320

192

260

99

35

Day [22Hr]

17,280

5,120

3,072

8,580

3,267

1,155

Month [26Day]

449,280

133,120

79,872

223,080

84,942

30,030

Deposition Temp

25~35℃

80℃ or higher

Target

Rotative & Orbital Magazine 12ea

Dome

 

문의하기

(주)코머신
대표이사  박은철사업자등록번호  553-86-00664
(우 17015) 경기도 용인시 기흥구 동백중앙로16번길 16-4 에이스 동백타워 1동 1101호

ⓒ2022 Komachine Co. All rights reserved.