Vactron
Vactron
Description
Overview
Collimates an emissive photon beam and directs it to the subject of experiment.
Remote and precise 5-axis control in directions of x, y, roll, pitch, and yaw UHV sealing induced by aluminum wires
Specifications
| Mirror Manipulator | Range | 12mm(0 ~100kgf) |
| Resolution | 0.02 ㎛ | |
| Precision | 0.1kgf(force sensor) | |
| Vacuum Performance | less than 1x10-9 mbar | |
| Maximum Bake-Out Temp | 120℃ | |
| Mirror Length | 100~1400mm | |
| Axis Actuator Type | 5P Harmonic Step Motor | |
| Tangential Slope Error | less than 2μrad | |
| Pitch (rotation about X axis) | Range | ±2.54° |
| Resolution | 0.018″ | |
| Roll (rotation about Y axis) | Range | ±2.6° |
| Resolution | 0.094″ | |
| Yaw (rotation about Z axis) | Range | ±2.03° |
| Resolution | 0.007″ | |
| X direction | Range | ±20.0 mm |
| Resolution | 0.02 ㎛ | |
| Z direction | Range | ±25.0 mm |
| Resolution | 0.05 ㎛ |
Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
ⓒ2024 Komachine Inc. All rights reserved.