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Combo Stocker
Model Name
Combo Stocker
Series
Line Automation
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System Engineering Mega Solution

Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer

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Manufacturer
System Engineering Mega Solution
Product Type
Machine
Brand
-
SKU
28964
Product Name
Combo Stocker
Model Name
Combo Stocker
Size
-
Weight
-
Product Details

Overview

Storage and transferring system for Reticle and Pod with N2 Purge System

 

Feature

- High Capacity (RSP-150, 6”Reticle)
  . Reticle Pod : 68 EA
  . Bare Reticle : 1,452 EA
- High Clean Class System
  . Pod area : SEC Class 1000
  . Bare area : SEC Class 1
- Transfer Interface : OHT

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System Engineering Mega Solution
System Engineering Mega Solution
Semi conductor equipment, Display equipment and Material handling automation equipment manufacturer
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