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System Engineering Mega Solution

System Engineering Mega Solution

Combo Stocker

Model

Series

Line Automation


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Overview

Storage and transferring system for Reticle and Pod with N2 Purge System

 

Feature

- High Capacity (RSP-150, 6”Reticle)
  . Reticle Pod : 68 EA
  . Bare Reticle : 1,452 EA
- High Clean Class System
  . Pod area : SEC Class 1000
  . Bare area : SEC Class 1
- Transfer Interface : OHT

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  553-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

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