The equipment for the Etching and Stripping processes during display panel manufacturing.
- Various Display Capabilities : LCD / OLED / Flexible - U&I Type In-Line (Slope / Horizon / DIP)
- Etch Rate Uniformity ≤ 5%↓
- CD Bias Uniformity ≤ 0.5㎛
- Temp. Control Accuracy :±0.5℃↓
- Chemical Fume and Particle Free (Non-contact Magnetic Transfer Mechanism
- Improvement of C.o.O