System Engineering Mega Solution
Etcher/Stripper
Model
Series
Display Equipment
Transaction Process
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Payment
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Delivery
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Shipment
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Origin
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Description
Overview
The equipment for the Etching and Stripping processes during display panel manufacturing.
Feature
Varrious Application
- Various Display Capabilities : LCD / OLED / Flexible - U&I Type In-Line (Slope / Horizon / DIP)
High Performance
- Etch Rate Uniformity ≤ 5%↓
- CD Bias Uniformity ≤ 0.5㎛
- Temp. Control Accuracy :±0.5℃↓
Outstanding Advantage
- Chemical Fume and Particle Free (Non-contact Magnetic Transfer Mechanism
- Improvement of C.o.O