Selcos
Selcos
Description
▷ Suitable for the automated production line and Research & Development system.
▷ It provides a highly integrated Technology and Mechanism
Application
- Applied to various thin film (Metal, Oxide, TCO) process
- Highly integrated semiconductor and
- electronic components substrate processing
- Thin-film solar cell manufacturing process
Specification
| Configuration | Loading, Transfer, Pre-treatment, Deposition(PVD, CVD) |
| Transfer | Hi-vacuum automatic robot |
| Cathode | Planar or Round Magnetron cathode |
| Target | Metal, Oxide, TCO |
Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
ⓒ2024 Komachine Inc. All rights reserved.