Search

MIDAS SYSTEM

MIDAS SYSTEM

MIDAS SYSTEM

MIDAS SYSTEM

HomeManufacturersMIDAS SYSTEM
1/1
MIDAS SYSTEM

MIDAS SYSTEM

Mask Aligner

Model

Series

-


Transaction Process

Please contact the manufacturer/supplier.

Payment

Contact the manufacturer/supplier.

Delivery

Contact the manufacturer/supplier.

Shipment

Contact the manufacturer/supplier.

Origin

Contact the manufacturer/supplier.


Description

Easy operation & Installation
PC Operation with PLC control
Compact size semi auto system
Image grab & Data log
More than 100 Program recipes

specification

Type PC control semi auto
Mask size up to 7" x 7"
Substrate size piece to 6"
UV lamp & Power 350W & power supply
Uniform beam size 6.25" x 6.25"
Beam Uniformity <±4%
Beam wavelength 350 ~ 450nm
365nm Intensity ~25mW/cm2
Alignment accuracy 1um
Process resolution 0.8um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options Anti-Vibration table
CCD BSA
UV Intensity meter
UV-LED(365nm) exposure module
etc.

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.