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  • MIDAS SYSTEM

    Model
    MDA-600S
    Series
    -

    Product Description

    Easy operation & Installation
    PC Operation with PLC control
    Compact size semi auto system
    Image grab & Data log
    More than 100 Program recipes

    specification

    Type PC control semi auto
    Mask size up to 7" x 7"
    Substrate size piece to 6"
    UV lamp & Power 350W & power supply
    Uniform beam size 6.25" x 6.25"
    Beam Uniformity <±4%
    Beam wavelength 350 ~ 450nm
    365nm Intensity ~25mW/cm2
    Alignment accuracy 1um
    Process resolution 0.8um@1um PR thickness with vacuum contact
    Process mode Soft, Hard, Vacuum contact & Proximity
    Substrate chuck moving x,y,z & θ
    Options Anti-Vibration table
    CCD BSA
    UV Intensity meter
    UV-LED(365nm) exposure module
    etc.

    Product List

    ETC

    MDA-400LJ
    MDA-400M
    MDA-60MS
    MDA-80MS
    MDA-80SA
    MDA-20000SA
    MDA-80FA
    MDA-12FA
    Cell type TSP aligner
    MDA-400LJ
    Spin-1200D
    Spin-3000A
    Spin-1200T
    Spin-3000T
    UV Lamp
    Intensity meter
    MINILAB
    MDA-400S (MDA-400M-6)
    MDA-600S
    MDA-40FA/60FA
    SPIN-4000A
    Spin-5000A/7000A
    Spin-3000D
    MDA-150 (M)
    Film type TSP aligner
    MDA-12SA