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MIDAS SYSTEM

MIDAS SYSTEM

MIDAS SYSTEM

MIDAS SYSTEM

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MIDAS SYSTEM

MIDAS SYSTEM

Mask Aligner

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Origin

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Description

Easy operation & Installation
Handling Substrates of Various sizes
Adopt UV-LED exposure module
UV-LED Life-time is long

specification

Type Fully manual (Mask Aligner)
Mask size up to 5" x 5"
Substrate size piece to 4" dia
UV lamp & Power UV-LED & power supply
Uniform beam size 125mm dia
Beam Uniformity <±3%
Beam wavelength 365nm Only
365nm Intensity ~20mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options etc.

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.