MECARO, The Republic of Korea - Komachine Supplier Profile and Product List

- Mecaro is a specialized company in core components for CVD and ALD processes in the semiconductor and FPD (Flat Panel Display) industries. The company focuses on the development and production of essential metal heater blocks and precursors for semiconductor manufacturing processes. It is also pursuing business diversification through the development of aluminum nitride (AlN)-based ceramic components and next-generation solar cells. Mecaro is a leading company with unique technological capabilities and a strong market share in the domestic semiconductor component market. The company actively responds to advanced technological changes through continuous R&D investment.Mecaro is a specialized company in core components for CVD and ALD processes in the semiconductor and FPD (Flat Panel Display) industries. The company focuses on the development and production of essential metal heater blocks and precursors for semiconductor manufacturing processes. It is also pursuing business diversification through the development of aluminum nitride (AlN)-based ceramic components and next-generation solar cells. Mecaro is a leading company with unique technological capabilities and a strong market share in the domestic semiconductor component market. The company actively responds to advanced technological changes through continuous R&D investment.
- Metal Heater Block: A core component for heating wafers in semiconductor CVD processes. Capable of precise temperature control and uniform heat distribution in processes below 400℃. Successfully developed and mass-produced domestically for the first time, accumulating over 20 years of technological expertise. Applies AlF (Aluminum Fluoride) surface coating technology to suppress aluminum surface corrosion, reduce foreign particle generation, and provide excellent surface temperature uniformity. Functions include precise and uniform thermal energy supply to wafers, purge gas supply systems, and vacuum chucking systems.Metal Heater Block: A core component for heating wafers in semiconductor CVD processes. Capable of precise temperature control and uniform heat distribution in processes below 400℃. Successfully developed and mass-produced domestically for the first time, accumulating over 20 years of technological expertise. Applies AlF (Aluminum Fluoride) surface coating technology to suppress aluminum surface corrosion, reduce foreign particle generation, and provide excellent surface temperature uniformity. Functions include precise and uniform thermal energy supply to wafers, purge gas supply systems, and vacuum chucking systems.
- Ceramic Components: Development of components using ceramic materials such as aluminum nitride (AlN). Actively pursuing the development of AlN ceramic heater blocks suitable for high-temperature processes above 500℃. Challenging the ceramic heater market, which is 90% monopolized by Japan, with final qualification tests currently underway with customers. Plans to expand application areas to power devices, communication equipment, and battery packs in the future.Ceramic Components: Development of components using ceramic materials such as aluminum nitride (AlN). Actively pursuing the development of AlN ceramic heater blocks suitable for high-temperature processes above 500℃. Challenging the ceramic heater market, which is 90% monopolized by Japan, with final qualification tests currently underway with customers. Plans to expand application areas to power devices, communication equipment, and battery packs in the future.
- Precursor: Liquid chemical material used for thin-film deposition in semiconductor manufacturing processes. Possesses ALD/CVD precursor design technology and successfully developed and mass-produced Zirconium (Zr)-based precursor (ZM40). Holds original patents and has a history of exclusive supply contracts with domestic customers. In 2022, the materials business division (M Chemical) was spun off and sold, shifting the business structure to focus on heater blocks.Precursor: Liquid chemical material used for thin-film deposition in semiconductor manufacturing processes. Possesses ALD/CVD precursor design technology and successfully developed and mass-produced Zirconium (Zr)-based precursor (ZM40). Holds original patents and has a history of exclusive supply contracts with domestic customers. In 2022, the materials business division (M Chemical) was spun off and sold, shifting the business structure to focus on heater blocks.
- Next-generation Energy Solutions (Mecaro Energy): Development of CVD-based CIGS (Copper Indium Gallium Selenide) thin-film solar cells. Entry into the renewable energy business through the development of perovskite solar cells and transparent solar cells. Aims to apply lightweight and high-efficiency renewable energy solutions to smart farms, greenhouses, sound barriers, BIPV, and window markets. Pursuing high efficiency and diverse supply chains through the development of CIGS-perovskite tandem solar cells.Next-generation Energy Solutions (Mecaro Energy): Development of CVD-based CIGS (Copper Indium Gallium Selenide) thin-film solar cells. Entry into the renewable energy business through the development of perovskite solar cells and transparent solar cells. Aims to apply lightweight and high-efficiency renewable energy solutions to smart farms, greenhouses, sound barriers, BIPV, and window markets. Pursuing high efficiency and diverse supply chains through the development of CIGS-perovskite tandem solar cells.
- Other Products: Susceptor, Asher, and other components for semiconductor and FPD processes.Other Products: Susceptor, Asher, and other components for semiconductor and FPD processes.
- Unique Heater Block Technology: Possesses the technological capability and over 20 years of accumulated know-how from being the first in Korea to develop and mass-produce heater blocks. Securing a technological advantage in responding to the increasing demand for high-performance heater blocks amidst the trend of semiconductor line width miniaturization.Unique Heater Block Technology: Possesses the technological capability and over 20 years of accumulated know-how from being the first in Korea to develop and mass-produce heater blocks. Securing a technological advantage in responding to the increasing demand for high-performance heater blocks amidst the trend of semiconductor line width miniaturization.
- Differentiated AlF Surface Coating Technology: The only company in Korea to apply AlF (Aluminum Fluoride) surface coating technology to heater blocks. Enhances product competitiveness by suppressing aluminum surface corrosion, reducing foreign particle generation, and providing excellent surface temperature uniformity.Differentiated AlF Surface Coating Technology: The only company in Korea to apply AlF (Aluminum Fluoride) surface coating technology to heater blocks. Enhances product competitiveness by suppressing aluminum surface corrosion, reducing foreign particle generation, and providing excellent surface temperature uniformity.
- Customer-tailored Design and Simulation Capabilities: Capable of rapidly developing highly suitable products through thermal distribution and thermal stress analysis simulations from the design stage. Provides customized design services considering specific customer process environments, ensuring optimal performance.Customer-tailored Design and Simulation Capabilities: Capable of rapidly developing highly suitable products through thermal distribution and thermal stress analysis simulations from the design stage. Provides customized design services considering specific customer process environments, ensuring optimal performance.
- Strong Market Position and Customer Trust: Maintains over 90% market share in metal heater blocks for Samsung Electronics and SK Hynix in Korea. Established a stable revenue base through long-term trust relationships with major customers and process technology-based problem-solving support.Strong Market Position and Customer Trust: Maintains over 90% market share in metal heater blocks for Samsung Electronics and SK Hynix in Korea. Established a stable revenue base through long-term trust relationships with major customers and process technology-based problem-solving support.
- Technological Localization and Price Competitiveness: Successfully localized heater blocks that were previously dependent on foreign products. Achieved price competitiveness with unit costs more than half that of imported products, contributing to the stabilization of the domestic semiconductor industry's supply chain.Technological Localization and Price Competitiveness: Successfully localized heater blocks that were previously dependent on foreign products. Achieved price competitiveness with unit costs more than half that of imported products, contributing to the stabilization of the domestic semiconductor industry's supply chain.
- Continuous Business Diversification Efforts: Securing future growth engines through the stable growth of the metal heater block business and the development of new businesses such as aluminum nitride (AlN) ceramic components and CIGS solar cells. Focuses on developing ceramic components and materials, which are future growth drivers, through its central research institute.Continuous Business Diversification Efforts: Securing future growth engines through the stable growth of the metal heater block business and the development of new businesses such as aluminum nitride (AlN) ceramic components and CIGS solar cells. Focuses on developing ceramic components and materials, which are future growth drivers, through its central research institute.
- Semiconductor Industry (Heater blocks, precursors, components for CVD, ALD processes)Semiconductor Industry (Heater blocks, precursors, components for CVD, ALD processes)
- FPD (Flat Panel Display) Industry (Heater blocks, components for CVD, ALD processes)FPD (Flat Panel Display) Industry (Heater blocks, components for CVD, ALD processes)
- Renewable Energy Industry (CIGS, Perovskite, Transparent Solar Cells)Renewable Energy Industry (CIGS, Perovskite, Transparent Solar Cells)
- Smart Farms, Greenhouses, Sound Barriers, Bus Stops (Application of transparent solar cells)Smart Farms, Greenhouses, Sound Barriers, Bus Stops (Application of transparent solar cells)
- Building-Integrated Photovoltaics (BIPV) and Window Market (Application of transparent solar cells)Building-Integrated Photovoltaics (BIPV) and Window Market (Application of transparent solar cells)
- Power Devices, Communication Equipment, Battery Packs (Planned expansion of ceramic processing technology)Power Devices, Communication Equipment, Battery Packs (Planned expansion of ceramic processing technology)
- Japan, Taiwan, Singapore, ChinaJapan, Taiwan, Singapore, China
- EuropeEurope
- United StatesUnited States
- Japanese Patent: PEDESTAL HEATER BLOCK HAVING ASYMMETRIC HEATING WIRE STRUCTURE (JP 7522506 B2, registered 2024.07.17)Japanese Patent: PEDESTAL HEATER BLOCK HAVING ASYMMETRIC HEATING WIRE STRUCTURE (JP 7522506 B2, registered 2024.07.17)
- Chinese Patent: BUTTERFLY VALVE CONTROL METHOD AND DEVICE (CN 118434991, filed 2024.05)Chinese Patent: BUTTERFLY VALVE CONTROL METHOD AND DEVICE (CN 118434991, filed 2024.05)
- Original patent for Zirconium precursor (ZM40)Original patent for Zirconium precursor (ZM40)
- ISO 9001 (Quality Management System) certificationISO 9001 (Quality Management System) certification
- ISO 14001 (Environmental Management System) certificationISO 14001 (Environmental Management System) certification
- ISO 45001 (Occupational Health and Safety Management System) certificationISO 45001 (Occupational Health and Safety Management System) certification
- ISO 22301 (Business Continuity Management System) certificationISO 22301 (Business Continuity Management System) certification
- ISO 27001 (Information Security Management System) certificationISO 27001 (Information Security Management System) certification
- Excellent Technology Evaluation Company certification (NICE Information Service, 2016)Excellent Technology Evaluation Company certification (NICE Information Service, 2016)
- Specialized Parts and Materials Company certification (Ministry of Trade, Industry and Energy, 2004)Specialized Parts and Materials Company certification (Ministry of Trade, Industry and Energy, 2004)
- Management Innovation Type MAIN-BIZ Company certification (2009)Management Innovation Type MAIN-BIZ Company certification (2009)
- Designation as Excellent Technology Research Center (ATC) (Ministry of Trade, Industry and Energy, 2015)Designation as Excellent Technology Research Center (ATC) (Ministry of Trade, Industry and Energy, 2015)
- Family-Friendly Company certification (2025)Family-Friendly Company certification (2025)
- Bronze Prize in 'Patent Technology Commercialization' by Korea Invention Promotion Association (2004)Bronze Prize in 'Patent Technology Commercialization' by Korea Invention Promotion Association (2004)
- 5 Million Dollar Export Tower Award (2010), 10 Million Dollar Export Tower Award (2013)5 Million Dollar Export Tower Award (2010), 10 Million Dollar Export Tower Award (2013)
- Dongtap Industrial Medal for meritorious service in 2023 Korea Green Management Awards (CEO Lee Jae-jung)Dongtap Industrial Medal for meritorious service in 2023 Korea Green Management Awards (CEO Lee Jae-jung)
- Presidential Award for Green Management (2022)Presidential Award for Green Management (2022)
- ESG Management Corporate Award at the 17th Korea KOSDAQ Awards (2025)ESG Management Corporate Award at the 17th Korea KOSDAQ Awards (2025)