LASER & PHYSICS
LASER & PHYSICS
Description
Products Detail
Various wave length and energy
Products Introduction
Model | EKF-000 | ECL-000 | EAF-000 |
Wave length | 248 nm | 308 nm | 193 nm |
Gas | KrF | XeCl | ArF |
Repetion rate(Hz) | 50, 100, 500, 1000 | ||
Energy/pulse (mJ) | 10, 30, 50, 100. 500, 1000 | ||
Cooling | 1st water, 2nd air or water | ||
Weight | chamber : ≤ 100 kg | ||
Dimension | 723(L) x 244(w) x 194(H) | ||
- Excimer laser for semiconductor exposure step
- Applied to LCD production line.
- Excimer laser for semiconductor exposure step
- Applied to LCD production line.
Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
ⓒ2024 Komachine Inc. All rights reserved.