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LASER & PHYSICS

LASER & PHYSICS

LASER & PHYSICS

LASER & PHYSICS

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LASER & PHYSICS

LASER & PHYSICS

Excimer Micro Processing System

Model

Series

Semiconductor


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Description

Products Detail

- KrF (ArF) Excimer Laser

- High precision optics, X-Y-Z stage



Products Introduction

Model    LPD-EK500 
Laser type    KrF (ArF)
Wave length   248 mm (193 nm)
Average power   10 W
Pulse energy   10 mJ @ 1000 Hz
Pulse width   10 ~ 25 nsec
Pulse stability   ±3 %
Cooling    water 
X-Y stroke   500 mm x 500 mm
Accuracy   ±4 ㎛
Repeatability   ±2 ㎛
Dimension   1750 mm(W) x 1500 mm(D) x 1850 mm(H)


- High precision micro processing system by excimer laser

- High power stability by new gas circulation system

- User friendly GUI with touch screen

- Drilling, Patterning etc



Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

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