Controller 
◾Sensor : SHIM Gauge, ATM SHIM Gauge 
◾Measurement Range : SHIM Gauge 1000Torr ~ 1.0E-03Torr, ATM Gauge 1500Torr ~ 1.0E-03Torr 
◾Standards Analog Output & 2-SetPoints Relay Output 
◾Optional : RS232, RS422/485 
◾Unit : Torr & Pascal 

※ Gauge axis must be horizontal to provide accurate measurement above 1 Torr
 
 
 

SHIM Gauge
◾Measurement Range:1000 ~ 1.0E-3Torr
◾Gas Calibration : Air or N2 
◾Bake Out Temp : 100℃ in Air or Vacuum
◾Cable : 9pin D-sub Connector, Multi Conductor Shield Cable 
◾Cable Length : 3m(Standard), 50m(Maximum)
◾Fitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33"CF, 1/4"VCR 
 
 
ATM SHIM Gauge 
◾Measurement Range:1500Torr ~ 1.0E-03Torr
◾Gas Calibration : Air or N2
◾Bake Out Temp : 100℃ in Air Vacuum
◾Cable : 9pin D-Sub Connector, Multi Conductor Shield Cable
◾Cable length : 3m(Standard), 50m(Maximum)
◾Fitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33" CF, 2.75"CF, 1/4" VCR
◾Gauge Axis must be horizontal to provide accurate measurement above 1 Torr