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Korea Vacuum Tech

Korea Vacuum Tech

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Model

Series

Bench Top


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

<tab title="Overview">

Korea Vacuum Tech, Ltd. (KVT) is proud to introduce the latest revolutionary

addition to our product line, the Intelsi-S, small vacuum system. Deposite its compact

convenient size, easy operation and affordability, functionality is in no way sacrificed. 

The modular design of the Intelsi-S makes it highly configurable to meet specific

customer needs and numerous stock options are also available. A fully automated

Laptop PC helps round out this extremely usable yet robust diminutive package.

Advantages

≻ Easy to operate

≻ No cooling required

≻ Precise reproducible coating

≻ Fully adaptable to a wide range of specimens

≻ Easy loading and unloading of specimens

 

Features

≻ Extreme versatility

≻ High capacity vacuum pumping

≻ Fully automated PC control

≻ Capable of producing very thin resultant films

≻ Suitable for reactive gas deposition (O2, Ne etc.)

≻ Gold coating for SEM

≻ Metal Deposition such as Al, Au and so on


<tab title="Specifications">

Specifications

Intelsi – S

Intelsi - ST

System Dimensions

501mm(W) x 540mm(D) x 421mm(H) – 19.7” x 21.3” x 16.6”

35kg (77.2 lb)

Electrical / Compressed Air

110V/220V, Single Phase, 50/60Hz / 6~7kfg/cm2

Target Size

2 inch (50.8mm) diameter

Pumping Capability

Rotary Pump

Rotary & Turbo Molecular Pump

Gas Supply Unit

Metering Valve

DC Power Supply

Ultimate Pressure

Less than 5.0E-3Torr

Less than 5.0E-6Torr

Auto pumping, Auto process and auto vent using PLC & Simple buttons

Deposition Source

Sputtering Cathode 1EA

Vacuum Gauge(Reading Range)

ATM to 5.0E-3Torr

ATM to 5.0E-6Torr

Throttle Valve

N/A

On/Off type

Film Thickness Uniformity

Less than ±5%

Optional Items

Substrate rotation & Z-motion, Substrate Heating, MFC
RF Power supply, QCM thickness Monitor

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  535-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

ⓒ2022 Komachine Co. All rights reserved.