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Korea Vacuum Tech

Korea Vacuum Tech

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Model

Series

Etcher


Transaction Process

Please contact the manufacturer/supplier.

Payment

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Delivery

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Shipment

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Origin

Korea (Republic of)


Description

Korea Vacuum Tech  RIE Series

Overview

Reactive ion Etching (RIE) is an etching technology that utilizes chemically reactive

plasma to remove masked materials deposited on wafers during microfabrication. The

combination of an electromagnetic field in a low pressure (vacuum) environment is

used to create a plasma source from which high energy ions attack a wafer surface and react.

Features

≻ High selectivity, uniform plasma etching

≻ Simple configuration makes maintenance easy

≻ Negative self-bias forms on lower electrode

≻ Low damage & contamination


System configuration

Substrate size

2” - 6” (50.8mm - 150mm)

Operating pressure (Torr)

< 30mTorr

Uniformity within substrate /

substrate to substrate surfaces

± 5% max.

Process Chamber

Al anodized Chamber

Heating or cooling / Bias

Ultimate Pressure

Gas Nozzle

6” - 8” shower head type


Korea Vacuum Tech  RIE Series 1

Korea Vacuum Tech  RIE Series 2

Overview

Reactive ion Etching (RIE) is an etching technology that utilizes chemically reactive

plasma to remove masked materials deposited on wafers during microfabrication. The

combination of an electromagnetic field in a low pressure (vacuum) environment is

used to create a plasma source from which high energy ions attack a wafer surface and react.

Features

≻ High selectivity, uniform plasma etching

≻ Simple configuration makes maintenance easy

≻ Negative self-bias forms on lower electrode

≻ Low damage & contamination


System configuration

Substrate size

2” - 6” (50.8mm - 150mm)

Operating pressure (Torr)

< 30mTorr

Uniformity within substrate /

substrate to substrate surfaces

± 5% max.

Process Chamber

Al anodized Chamber

Heating or cooling / Bias

Ultimate Pressure

Gas Nozzle

6” - 8” shower head type


Korea Vacuum Tech  RIE Series 3

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  535-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

ⓒ2022 Komachine Co. All rights reserved.