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Korea Vacuum Tech

Korea Vacuum Tech

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Model

Series

Evaporator


Transaction Process

Please contact the manufacturer/supplier.

Payment

Contact the manufacturer/supplier.

Delivery

Contact the manufacturer/supplier.

Shipment

Contact the manufacturer/supplier.

Origin

Korea (Republic of)


Description

Korea Vacuum Tech  E-beam & Thermal Series

Overview

 An evaporator uses an electric resistance heater or high-energy beam to melt material

and to raise its vapor pressure to a useful range. This process takes place in a high

vacuum state to allow the vapor to reach the substrate without reacting with or

scattering against other gas-phase atoms in the chamber while reducing the

incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series

evaporation systems are capable of fabricating multi-layer thin films by applying this

co-deposition process.

≻ Excellent Thickness Uniformity

        The KVE Series E-Beam&Thermal Evaporator System provide excellent thickness uniformity

        of resultant films. And if you deposit the thin films to same condition, you will get the thin

        films of same feature.

≻ Combination system

       This system has E-beam source and thermal source. Therefore, you can deposit thin

       films of various properties.


Process Chamber

Stainless steel

Vacuum Pumping Station

Cryo, TMP

Loadlock Chamber

Optional item

Substrate Unit

Rotation / Heating

Sample Size

4inch ~

Process pressure

< 5.0E-4Torr

Vacuum Gauge Controller

ATM ~ 1.0E-10Torr

Power Supply Unit

6kW, 8kW, 10kW

Crucible Size

4cc, 7cc, 15cc, 25cc

Pocket Number

Single, 4,6

Thermal source

W boat, 10V, 300A

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr

System Control

PC auto / PLC Semi-auto


Korea Vacuum Tech  E-beam & Thermal Series 1

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  535-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

ⓒ2022 Komachine Co. All rights reserved.