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Korea Vacuum Tech

Korea Vacuum Tech

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Model

Series

Evaporator


Transaction Process

Please contact the manufacturer/supplier.

Payment

Contact the manufacturer/supplier.

Delivery

Contact the manufacturer/supplier.

Shipment

Contact the manufacturer/supplier.

Origin

Korea (Republic of)


Description

Korea Vacuum Tech  Thermal Series

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. 

 

FEATURES

≻ Excellent thin film uniformity

≻ Vacuum compatible to 5.0E-7Torr

≻ Rotate the substrate.

≻ Stability rate

≻ Multi-layer processing

≻ Easy Manipulation


Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Substrate Unit

Rotation / Heating / Cooling

Sample Size

4” ~ 12”

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / up to 8

Process Control Type

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr


Korea Vacuum Tech  Thermal Series 1

Korea Vacuum Tech  Thermal Series 2

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. 

 

FEATURES

≻ Excellent thin film uniformity

≻ Vacuum compatible to 5.0E-7Torr

≻ Rotate the substrate.

≻ Stability rate

≻ Multi-layer processing

≻ Easy Manipulation


Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Substrate Unit

Rotation / Heating / Cooling

Sample Size

4” or more

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / Two or more

Process Control Type

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr


Korea Vacuum Tech  Thermal Series 3

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  535-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

ⓒ2022 Komachine Co. All rights reserved.