Chat with us, powered by LiveChat Thermal Series | Korea Vacuum Tech - Komachine
Product Name
Model Thermal Series
Series Evaporator
Catalog
Product Description

Korea Vacuum Tech  Thermal Series

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. 

 

FEATURES

≻ Excellent thin film uniformity

≻ Vacuum compatible to 5.0E-7Torr

≻ Rotate the substrate.

≻ Stability rate

≻ Multi-layer processing

≻ Easy Manipulation

Specifications

ITEM

Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Substrate Unit

Rotation / Heating / Cooling

Sample Size

4” ~ 12”

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / up to 8

Process Control Type

Auto

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr

Korea Vacuum Tech  Thermal Series 1

Korea Vacuum Tech  Thermal Series 2

Overview

KVT has developed the evaporator system with high precision deposition rate control

and unique design & technology. KVE series is designed and manufactured to

deposition equipment with variable item. 

 

FEATURES

≻ Excellent thin film uniformity

≻ Vacuum compatible to 5.0E-7Torr

≻ Rotate the substrate.

≻ Stability rate

≻ Multi-layer processing

≻ Easy Manipulation

Specifications

ITEM

Specifications

Process Chamber

Stainless steel

Vacuum Pumping Station

TMP / Cryo pump

Substrate Unit

Rotation / Heating / Cooling

Sample Size

4” or more

Power Supply Unit

10V,300A / 10V,100A

Source Type & Number

Boat, Crucible / Two or more

Process Control Type

Semi-auto

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr

Korea Vacuum Tech  Thermal Series 3

Products of Korea Vacuum Tech