Justek
Justek
Description
Specification
|
Axis |
X(Scan) |
Y(Step) |
| Work area |
700mm |
800mm |
| Guide |
Ceramic air bearing |
Air bearing |
| load mass |
100kg |
- |
| Acceleration |
2m/sec² |
|
| Position accuracy(보정후) |
±0.3㎛ |
±1.1㎛ |
| Repeatability |
±0.2㎛ |
±0.2㎛ |
| Straightness |
1.8㎛ |
2.4㎛ |
| Applications |
Photo mask inspection equipment |
|
Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
ⓒ2024 Komachine Inc. All rights reserved.