Search

Justek

Justek

Justek

Justek

HomeManufacturersJustek
1/1
Justek

Justek

XY Co-planar Air Bearing Stage

Model

Series

Motion Stages


Transaction Process

Please contact the manufacturer/supplier.

Payment

Contact the manufacturer/supplier.

Delivery

Contact the manufacturer/supplier.

Shipment

Contact the manufacturer/supplier.

Origin

Contact the manufacturer/supplier.


Description

Description

Since the load is supported by the XY plane, XY Co-Planar stage is free from the deformation caused by the movement of the load, common in the structure where Y axis is loaded on the X axis. This gives the advantages of high structural stability and low height. It can also generate various motions by use of the additional Z and T axis.

 

Specification

Axis

   
Work area

520mm X 520mm X 6mm(Z) X 360deg(T)

Guide

Air bearing

Load mass

20kg

Acceleration

2m/sec²

Position accuracy(보정후)

1㎛

Repeatability

±0.5㎛

Speed ​​ripple

0.1%, at 100mm/sec

T axis, Z axis

DD Motor, wedge type

Applications

Solar cell, Wafer Equipment, etc.

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.