J&L Tech
J&L Tech
Description
CARBOZEN ™ -H (Hybrid PVD) is a coating equipment which satisfies the customer's variety needs through a combination of Linear Ion Source and UBM sputter.
System Specification
| Chamber Size | Ø600×H600, Ø700×H900, Ø800×H1000, Ø1000×H1000, Ø1000×H1200, Custom-made |
| Jig System | 2 fold or 3 fold |
| Working Gas | Mass flow control system Ar · O2 · C2H2 · CH4 · C6H6 · etc |
| Plasma Source | Linear Ion Source, UBM Sputter |
| The Initial Vaccum Degree |
~10-6Torr |
| Bias Power | Pulsed DC |
| Heater | Max 250℃ [Optional 450℃] |
| Device Operation | Automatic / Semi-automatic |
Applications
Download
Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
ⓒ2024 Komachine Inc. All rights reserved.