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Global Standard Technology

Global Standard Technology

Global Standard Technology

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Global Standard Technology

Global Standard Technology

Heat Exchanger Type

Model

Series

Thermal Management


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Description


Overview
ㆍSystem that uses low-temperature process water (PCW) to cool working fluid (colant, etc.) and absorb the heat arising from semiconductor and FPD manufacturing processes, supplying working fluid (coolant) at a constant temperature required in processes
Areas of application Etch, CVD, ALD etc.


Characteristics
ㆍHeat Exchanger Type(Multi Channel supported)
ㆍCan be used at high temperatures (30℃ ~ 200℃)
ㆍMinimal use of PCW through use of proportional valves
ㆍMinimal heater use
ㆍIncreased user convenience (use of Touch Screen)
ㆍVarious working fluids (Coolant, Water, Brine)

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

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