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Global Standard Technology

Global Standard Technology

Global Standard Technology

Global Standard Technology

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Global Standard Technology

Global Standard Technology

Thermal Type

Model

Series

Exhaust Management


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Origin

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Description

Overview

ㆍUse of gas to dispose of flammable and other gases used in semiconductor, LCD, LED, OLED and SOLAR processes, heating gas sufficiently to temperatures equal to or higher than their spontaneous ignition temperature

Area of application Semiconductor, LCD, OLED and Solar processes that use combustible gases.

 

Characteristics

ㆍHeater housing & Reactor corrosion prevention

ㆍStable temperature control of reactor parts

ㆍNox and CO emissions reductions

ㆍMaterial used for SiC heater protective pipes : INCONEL

ㆍSupply of CDA for oxidizing reaction

ㆍSteam injection (option)

 

Size

ㆍISIS-I
720(W) x 860(D) x1750(H)

ㆍISIS-II
840(W) x 1000(D) x1750(H)

 

Utility

Item Type Connection Type
ISIS-I ISIS-II
Electricity -- 208VAC 3Phase 75A 208VAC 3Phase 125A
CDA 5 ~ 6.5 kg/㎠ ½” SS compression ¾” SS compression
GN2 3 ~ 6 kg/㎠ ⅜” SS compression ⅜” SS compression
City Water 3 ~ 6 kg/㎠ ½” SS compression ¾” SS compression
Cooling Water 3 ~ 6 kg/㎠ ½” SS compression ¾” SS compression
Drain Water Gravity 40A PVC union 40A PVC union
Pump 20A PVC union 15A PVC union
Gas Exhaust -50 ~ -80㎜H2O MF100 Flange MF125 Flange
Cabinet Exhaust -30 ~ -60㎜H2O MF100 Flange MF100 Flange
NaOH (option) 0.5 ~ 1 kg/㎠ 1 ½” PVC double containment  

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.