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EUGENE TECH

EUGENE TECH

Single Plasma Treatment System

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Origin

Korea (Republic of)


Description

The Albatross™ : Our high density and low electron temperature plasma offers many advantages for plasma surface treatment processes. Our patented, dual rotated ICP plasma antenna technology, surrounding a quartz chamber, provides excellent film uniformity, very clean treatment and wide process range to meet every customer’s needs.

 

Key Features

- Dual Rotated Spiral ICP Antenna Plasma Source

- Quartz Chamber for Metal Contamination Free Process

- High Temperature Process up to 600°C

- High Vacuum Configuration w/Turbo Molecular & Dry Pumps   

 

Benefits

- Damage Free Plasma 

- Lower Particle Generation

- Wide Process Window

- Thick Plasma Oxidation

 

Applications

EUGENE TECH Single Plasma Treatment System Albatross™

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  535-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

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