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EUGENE TECH

EUGENE TECH

EUGENE TECH

EUGENE TECH

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EUGENE TECH

EUGENE TECH

Single Plasma Treatment System

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Description

The Albatross™ : Our high density and low electron temperature plasma offers many advantages for plasma surface treatment processes. Our patented, dual rotated ICP plasma antenna technology, surrounding a quartz chamber, provides excellent film uniformity, very clean treatment and wide process range to meet every customer’s needs.

 

Key Features

- Dual Rotated Spiral ICP Antenna Plasma Source

- Quartz Chamber for Metal Contamination Free Process

- High Temperature Process up to 600°C

- High Vacuum Configuration w/Turbo Molecular & Dry Pumps   

 

Benefits

- Damage Free Plasma 

- Lower Particle Generation

- Wide Process Window

- Thick Plasma Oxidation

 

Applications

EUGENE TECH Single Plasma Treatment System Albatross™

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.