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EUGENE TECH

EUGENE TECH

Single Thermal LPCVD System

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Origin

Korea (Republic of)


Description

The BlueJay™ : Temperature uniformity control and tunable process gas flow in our multi-chamber, single wafer platform offer unique process flexibility, excellent film thickness uniformity and repeatability, lower thermal budgets and ease of tool matching.

 

The BlueJay-e™ : Next generation, compact version offering the same process advantages with a smaller footprint and lower CoO

 

Key Features

- Independent Dual Zone Temperature Control for Better Film Uniformity

- Up to 800°C Process Capability 

- High Throughput 

- Optimized Design Based on the Computational Flow Dynamics (CFD)

- Flexible Gas Panel Configuration

- Centralized Architecture Using Device Net Protocol

 

Benefits

- Excellent Thickness Uniformity & Reproducibility

- Lower Thermal Budget vs. Traditional Batch Furnaces

- Lower Particle Generation via In-situ Dry Cleaning

- Multiple Applications with Versatile Gas Options

- Industry Standard Tool with Production-proven Platform

 

Applications

EUGENE TECH Single Thermal LPCVD System BlueJay™ / BlueJay-e™

Inquiry

KOMACHINE CO., LTD.
CEO  Charlie ParkCorporate #  535-86-00664
(Post 17015) 1101ho ,16-4, Dongbaekjungang-ro 16beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, Republic of Korea

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