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Canisters

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Description

Canisters

CN1 supplies various types of canister which contains liquid chemicals for ALD- and CVD-related processes in semiconductor-based industries

 

Product information

CN1 Canisters

Product type

Feature & Advantages

ㆍVolume : 1~200 liter

ㆍ316L stainless body with EP treatment

ㆍMaximum safety and cost efficient

ㆍHydraulic pressure : 300kPa

ㆍLeak rate : under 2.0×10-9 mbar·l/sec

 

19 liter DLI Canister

 

CN1 Canisters  1

Class

Specification

Transfer type

DLI(Direct Liquid Injector) for LDS

Valve type

1/4″ Pneumatic diaphragm valve

Gasket

Teflon or Metal

Inlet/Outlet port

1/4″ Male VCR

Refill port

1/4″ or 1/2″ Male VCR

Purge valve

Option

Level sensor

Option

 

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.