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Atomic-Shell

Model

Series

ALD


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Description

Rotating reactor ALD for shell coating on core structure

ㆍNano size powder coating system

ㆍReactor volume : > 100cc

ㆍFilter size : Variable(from 0.5µm~)

ㆍHorizontal rotation system

ㆍPrecursor canister : 4EA

ㆍProcess temperature : R.T. ~ 350°C (Reactor body : 230°C)

ㆍReactor rotation : DC Motor

ㆍRotation speed : 10 ~ 120rpm

ㆍBase pressure : under 20mTorr

ㆍApplication : Coating on particle, wire, tube, etc.

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.