Information
407 W Vine St, Hatfield, PA 19440, USA
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Overview
- Summary
- Brooks Instrument, a global leader in precision fluid measurement and control technology, offering a diverse range of high-precision instruments including flow controllers, flow meters, vacuum measurement devices, and liquid multi-channel controllers. The company provides essential solutions for process efficiency and productivity enhancement in demanding industries such as semiconductor, pharmaceutical, and chemical manufacturing.Brooks Instrument, a global leader in precision fluid measurement and control technology, offering a diverse range of high-precision instruments including flow controllers, flow meters, vacuum measurement devices, and liquid multi-channel controllers. The company provides essential solutions for process efficiency and productivity enhancement in demanding industries such as semiconductor, pharmaceutical, and chemical manufacturing.
- Key Products/Technologies
- Mass Flow Controllers & Meters: A comprehensive product line including thermal mass flow controllers (SLA Series, SLAMf Series, GF100 Series, GF120xHT Series), Coriolis mass flow controllers (Quantim® QMC Series), and pressure-based mass flow controllers. The GF120xHT Series represents a high-temperature thermal mass flow controller, operational from 45°C to 150°C, specifically supporting solid and liquid precursors in semiconductor manufacturing. The Quantim® QMC Series, a third-generation Coriolis flow meter, is designed for very low-flow gas and liquid measurement and control, providing true mass flow, accurate density, and multivariable outputs. The SLA Series Biotech MFCs are engineered for bioprocessing, featuring a high turndown ratio, certified materials (USP, FDA, ADI-free O-rings), and long-term stability.Mass Flow Controllers & Meters: A comprehensive product line including thermal mass flow controllers (SLA Series, SLAMf Series, GF100 Series, GF120xHT Series), Coriolis mass flow controllers (Quantim® QMC Series), and pressure-based mass flow controllers. The GF120xHT Series represents a high-temperature thermal mass flow controller, operational from 45°C to 150°C, specifically supporting solid and liquid precursors in semiconductor manufacturing. The Quantim® QMC Series, a third-generation Coriolis flow meter, is designed for very low-flow gas and liquid measurement and control, providing true mass flow, accurate density, and multivariable outputs. The SLA Series Biotech MFCs are engineered for bioprocessing, featuring a high turndown ratio, certified materials (USP, FDA, ADI-free O-rings), and long-term stability.
- Variable Area Flow Meters (Rotameters): Various models of glass and metal tube rotameters, such as MT3809, Sho-Rate Model 1250/1255, and GT1305/1306. The company's foundational technology includes an innovative side-plate, dowel-pin principle for rotameter construction.Variable Area Flow Meters (Rotameters): Various models of glass and metal tube rotameters, such as MT3809, Sho-Rate Model 1250/1255, and GT1305/1306. The company's foundational technology includes an innovative side-plate, dowel-pin principle for rotameter construction.
- Vacuum Measurement Devices: Including vacuum capacitance manometers (CMC Series, VersaTorr BVT100 Series) and Pirani gauges. The VersaTorr BVT100 Series offers an ultra-wide measuring range of 9 decades, incorporating MEMS sensor technology, advanced digital signal processing, and a gas-independent diaphragm sensor.Vacuum Measurement Devices: Including vacuum capacitance manometers (CMC Series, VersaTorr BVT100 Series) and Pirani gauges. The VersaTorr BVT100 Series offers an ultra-wide measuring range of 9 decades, incorporating MEMS sensor technology, advanced digital signal processing, and a gas-independent diaphragm sensor.
- Pressure Measurement & Control: A range of pressure controllers, pressure gauges, pressure transmitters, and pressure sensors, including SolidSense II® Pressure Transducers. These products ensure accurate and stable gas and liquid pressure measurement solutions.Pressure Measurement & Control: A range of pressure controllers, pressure gauges, pressure transmitters, and pressure sensors, including SolidSense II® Pressure Transducers. These products ensure accurate and stable gas and liquid pressure measurement solutions.
- Liquid Delivery Systems: Direct liquid injection vaporizer systems and ultrasonic flow meters (BCU Series). The BCU Series is a non-invasive clamp-on ultrasonic flow meter with EtherNet/IP for bioprocessing, enabling accurate liquid flow measurement through flexible tubing without contact with the process fluid.Liquid Delivery Systems: Direct liquid injection vaporizer systems and ultrasonic flow meters (BCU Series). The BCU Series is a non-invasive clamp-on ultrasonic flow meter with EtherNet/IP for bioprocessing, enabling accurate liquid flow measurement through flexible tubing without contact with the process fluid.
- Core Advantages
- Global Leadership and Largest Installed Base: Holding the world's largest installed base of mass flow controllers, positioning the company as one of the most trusted suppliers of mass flow technology to the global semiconductor industry. A leader in fluid measurement and control technology since its founding in 1946.Global Leadership and Largest Installed Base: Holding the world's largest installed base of mass flow controllers, positioning the company as one of the most trusted suppliers of mass flow technology to the global semiconductor industry. A leader in fluid measurement and control technology since its founding in 1946.
- Precision and Reliability: Delivering accurate, reliable, and repeatable results with exceptional long-term stability and superior drift stability. Consistent performance assurance even in the most demanding environments.Precision and Reliability: Delivering accurate, reliable, and repeatable results with exceptional long-term stability and superior drift stability. Consistent performance assurance even in the most demanding environments.
- Extensive Product Portfolio and Technological Innovation: A comprehensive lineup of flow, pressure, and vacuum measurement and control products. Integration of innovative brands like UNIT Instruments, Tylan, Key Instruments, and Celerity, enhancing technological superiority.Extensive Product Portfolio and Technological Innovation: A comprehensive lineup of flow, pressure, and vacuum measurement and control products. Integration of innovative brands like UNIT Instruments, Tylan, Key Instruments, and Celerity, enhancing technological superiority.
- Industry-Specific Tailored Solutions: Providing customized solutions that meet the specific requirements of high-tech industries such as semiconductor, biopharmaceutical, and chemical manufacturing. Specialized product lines and certifications for strict regulatory compliance.Industry-Specific Tailored Solutions: Providing customized solutions that meet the specific requirements of high-tech industries such as semiconductor, biopharmaceutical, and chemical manufacturing. Specialized product lines and certifications for strict regulatory compliance.
- Global Manufacturing and Service Network: Manufacturing, sales, and service locations spanning the Americas, Europe, and Asia. A dedicated manufacturing and engineering center in Yongin, Korea, for semiconductor industry support, ensuring prompt regional customer assistance.Global Manufacturing and Service Network: Manufacturing, sales, and service locations spanning the Americas, Europe, and Asia. A dedicated manufacturing and engineering center in Yongin, Korea, for semiconductor industry support, ensuring prompt regional customer assistance.
- Robust Patent Portfolio: Possession of over 140 global patents, with 118 granted and over 32% active patents. This demonstrates continuous innovation and technological leadership in fluid measurement and control technology.Robust Patent Portfolio: Possession of over 140 global patents, with 118 granted and over 32% active patents. This demonstrates continuous innovation and technological leadership in fluid measurement and control technology.
- Target Industries
- Semiconductor ManufacturingSemiconductor Manufacturing
- Pharmaceuticals and BiopharmaceuticalsPharmaceuticals and Biopharmaceuticals
- Chemical and PetrochemicalChemical and Petrochemical
- Oil & GasOil & Gas
- Thin Films, Coatings, & Surface TreatmentsThin Films, Coatings, & Surface Treatments
- Alternative Energy, Solar Cell, LEDAlternative Energy, Solar Cell, LED
- Life SciencesLife Sciences
- AnalyticalAnalytical
- Aerospace & AutomotiveAerospace & Automotive
- Food & BeverageFood & Beverage
- Water & Wastewater TreatmentWater & Wastewater Treatment
- Fuel Cell ResearchFuel Cell Research
- Medical DevicesMedical Devices
- Major Markets
- South Korea, Japan, Across AsiaSouth Korea, Japan, Across Asia
- Across Europe, Hungary, NetherlandsAcross Europe, Hungary, Netherlands
- United States, Across the AmericasUnited States, Across the Americas
- Certifications/Patents
- ISO 9001:2015 certificationISO 9001:2015 certification
- ISO/IEC 17025:2017 accredited calibrations (including for SLA Series mass flow controllers)ISO/IEC 17025:2017 accredited calibrations (including for SLA Series mass flow controllers)
- RoHS and REACH complianceRoHS and REACH compliance
- KHK Certification (for the Japanese market)KHK Certification (for the Japanese market)
- USP, FDA, and ADI-free O-rings and valve seat certifications (for biopharmaceutical applications)USP, FDA, and ADI-free O-rings and valve seat certifications (for biopharmaceutical applications)
- NIST traceability and International Calibration Certificates (ICC)NIST traceability and International Calibration Certificates (ICC)
- IP66 rating (for SLAMf Series and other products)IP66 rating (for SLAMf Series and other products)
- A portfolio of over 140 global patents, with 118 granted and over 32% active. Notable patents include US6752166B2 (most cited patent), US7874208 (wide-range flow controller), US7905139 (mass flow controller with improved dynamics), US9631993 (self-heated MEMS-based capacitance diaphragm gauge), and US7991510 (flow measurement and control with bubble detection).A portfolio of over 140 global patents, with 118 granted and over 32% active. Notable patents include US6752166B2 (most cited patent), US7874208 (wide-range flow controller), US7905139 (mass flow controller with improved dynamics), US9631993 (self-heated MEMS-based capacitance diaphragm gauge), and US7991510 (flow measurement and control with bubble detection).
- Pioneering technological developments such as MultiFlo™ (the first gas and range programmable thermal mass flow controller) and the first thermal mass flow controller (SLA Series) and variable area meters (MT3809 & MT3750) with Foundation Fieldbus.Pioneering technological developments such as MultiFlo™ (the first gas and range programmable thermal mass flow controller) and the first thermal mass flow controller (SLA Series) and variable area meters (MT3809 & MT3750) with Foundation Fieldbus.
Introduction
Location
407 W Vine St, Hatfield, PA 19440, USA
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