- Polish, PSS, Epi, LED FAB process Monitoring & Inspection
  - Inspection for LED Wafer Pre-alignment & LED Wafer Macro with Camera
  - Using 8 Load Ports, Long Time Automatic Inspection and Sorting Function by Grade is Available. 

▪ Inspection Item
  - Polish : Pit, Particle
  - PR : FM, Scratch, Particle
  - PSS : FM Residue, No Pattern, Particle 
  - Epi : Pit, Pinhole, Press NG, Particle
  - FAB : Pad defect, Epitaxial Defect, Finger defect, ITO defect, Mesa Line, etc.