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  • ATI, Advanced Technology

    Reticle Macro AFVI
    Model
    SUN
    Series
    Semiconductor

    Product Description

    Reticle Macro Inspection 

    ▪ Particle inspection on all area of reticle : 

       - Pellicle, Pellicle Frame, Pattern, Backside

    ▪ Multi scanning with vertical and oblique optical system

    ▪ Inspection of various reticles with 1 recipe 

       - No prior work for each mask needed

    ▪ Applicable to full automation

    ▪ 0.5um pinhole/particle detection in non-pattern area

    ▪ Optional function to distinguish particle position at top/bottom of pellicle

    ▪ Verifying review module included

    ATI, Advanced Technology Reticle Macro AFVI SUN

    Product List

    Semiconductor

    Wafer Inspection System
    WIND
    Auto Scope System
    OAK
    CIS Inspection System
    ACIS-1200 Series
    Reticle Macro AFVI
    SUN
    Packaging Inspection System
    CYPRESS

    LED

    LED Wafer AFVI
    AVIS-5000P
    LED Chip AFVI
    AVIS-5000C

    PCB

    IC Package Substrate AFVI
    AVIS-1800 Series
    HDI PCB AFVI
    AVIS-3600 Series
    IC Package Substrate Sorting System
    ASIS-1000C

    Laser Application

    Laser Marking System
    LMS Series
    Fiber Laser Cutting System
    ALC-100
    UV Laser Micro Machining System
    ULC-100

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    ezJet
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    OEM Product Development (Cell Isolator)