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CIGS System
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Vacuum System
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주요 응용분야 · 금속, 산화물, 질화물 코팅(Cu Seed layer, Mask용 Cr , Au, Ti, Pt, Ni, SiO2, TiO2, TiN, CrN 등) · 다층 박막 광학 코팅(칼라필터, AR 코팅, DBR 코팅) · TCO 코팅(ZnO, ITO 등)
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