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PTC

PTC

PTC

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PTC

PTC

THC

Model

Series

Test Chamber


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Description

Precision temperature and humidity control system of semiconductor photo process track facility

Low electricity energy saving system

Production based on optimized design (stability and operational convenience)

ITEM

SPECIFICATION

TEMPERATURE CONTROL RANGE

THC : 20 ~ 25℃ (±0.05 ℃)
TCU : 20 ~ 25℃ (±0.05 ℃)

HUMIDITY CONTROL RANGE

THC : 40 ~ 45% (±0.25%)

FLOW RATE

88.5 ℓ/min

WIND SPEED

61㎥/min

 

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.