PTC
PTC
Description
System that decomposes the target gas generated from the semiconductor manufacturing process using extreme high temperature JET using PLASMA
High decomposition efficiency of PFC GAS (99%)
|
ITEM |
SPECIFICATION |
|
Dimension(W x D x H) |
720mm x 850mm x 1680mm |
|
Power |
208 VAC, 3 Phase, 3A |
|
Capacity |
300 SLM |
|
Utilities |
LNG, O2, CW, PCW, CDA, N2 |
Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664
ⓒ2024 Komachine Inc. All rights reserved.