Search

Korea Vacuum Tech

Korea Vacuum Tech

Korea Vacuum Tech

Korea Vacuum Tech

HomeManufacturersKorea Vacuum Tech
1/1
Korea Vacuum Tech

Korea Vacuum Tech

Evaporator

Model

Series

Evaporator


Transaction Process

Please contact the manufacturer/supplier.

Payment

Contact the manufacturer/supplier.

Delivery

Contact the manufacturer/supplier.

Shipment

Contact the manufacturer/supplier.

Origin

Contact the manufacturer/supplier.


Description

Overview

An evaporator uses an electric resistance heater or high-energy beam to melt material

and to raise its vapor pressure to a useful range. This process takes place in a high

vacuum state to allow the vapor to reach the substrate without reacting with or

scattering against other gas-phase atoms in the chamber while reducing the

incorporation of impurities from the residual gas in the vacuum chamber. The KVE Series

evaporation systems are capable of fabricating multi-layer thin films by applying this

co-deposition process.

 ≻ Excellent Thickness Uniformity

        The KVE Series E-Beam&Sputter Evaporator System provide excellent thickness uniformity of

        resultant films. And if you deposit the thin films to same condition, you will get the thin

        films of same feature.

≻ Combination system

        This system has E-beam source and sputtering source. Therefore, you can deposit

        thin films of various properties.


Process Chamber

Stainless steel

Vacuum Pumping Station

Cryo, TMP

Loadlock Chamber

Optional item

Substrate Unit

Rotation / Heating

Sample Size

4inch ~

Process pressure

< 5.0E-4Torr

Vacuum Gauge Controller

ATM ~ 1.0E-10Torr

Power Supply Unit

6kW, 8kW, 10kW

Crucible Size

4cc, 7cc, 15cc, 25cc

Pocket Number

Single, 4,6

Sputtering Cathode

4”,6” 600W, 1000W

Film Thickness Uniformity

< ±5%

Ultimate Pressure

< 5.0E-7Torr

System Control

PC auto / PLC Semi-auto


Korea Vacuum Tech  E-beam & Sputter Series

Inquiry

Komachine Inc.
Head Office:
Ace Dongbaek Tower 1-1101, 16-4,
Dongbaekjungang-ro 16beon-gil, Giheung-gu,
Yongin City, Gyeonggido, South Korea 17015
Branch Office:
606, Seoul Stratup Center, 10,
Noryangjin-ro, Dongjak-gu, Seoul, South Korea 06938
CEOCharlie Park
Corporate #535-86-00664

ⓒ2024 Komachine Inc. All rights reserved.